Ownership History
| BROOKS AUTOMATION US LLC | $100 | | 36796/43 | 1B | 02/07/2022 |
| BROOKS AUTOMATION HOLDING LLC | $100 | | 36795/276 | 1B | 02/07/2022 |
| BROOKS AUTOMATION INC | $27,000,000 | | 11318/0213 | 1G | 01/30/2001 |
| W9/TIB REAL ESTATE LTD PTNR | $8,450,000 | | 8968/0265 | 1G | 12/24/1997 |
| TEACHERS INSURANCE & ANNUITY | $5,228,466 | | 7323/0325 | 1L | 12/08/1994 |